Research at the chair of semiconductor technologies

Object of researches at the Institute of Semiconductors and Microsystems are the micro- and nanostructurings of semiconductors, insulators and metals as well as the associated electrical, mechanical and thermal effects. The technical equipment in our cleanroom facilitates the realization of test-structures with all essential technologies like vacuum coating of metals and insulators, dry and wet etching, electrochemic coating and chemical-mechanical polishing.

Atomic Layer Deposition (ALD)

foundational research in layer accretions at atomic layer deposition of metal layers
application of atomic layer deposition in the nanotechnology of metal layers

Storage cells

hafnium oxide based insulating layers for storage cells (joint project SOHAR)
development and characterization of materials for storage applications, realized by a capacitor-route (KONDOR)

Material modification and characterization

researching the influence of a RTP treatment on ohmic and Schottky contacts of metals with p-type and n-type semiconductors ZnO
smallest resistivity of copper in NANO-pathways (KUWANO)
electrical characterization of SACVD-Layers
porous ultra-low-k-dielectrics: deposition, healing up, structuring, planarization, integration
concept of simulation for 32-nm CMOS-technologies (SIMKON) on the subject of: research of chemical and physical surface activities during oxide-CMP

Connection technology

development of a process chain for producing, handling and applying coated bondig wires

Solar cells

coating of flexible substrates with a-silicon pin-solar cells using a VHF-PECVD pass-through-facility

Biosciences

laser-stretching in opto-fluidic microsystems – a new process for the diagnosis and seperation of cells in the life-science-area