MEMS - based Labs on a chip

Microelectromechanical systems (MEMS) are functional units in the µm-scale consisting of sensor, actuator and data processing. Examples for such systems are acceleration sensors, image stabilizers and actuators for micro mirrors. For the MEMS production, technologies of the semiconductor industry are used. These well established technical processes allow manufacturing of large quantities at low costs.

MEMS used in our microfluidic systems are based on stimuli-sensitive polymers, so called hydrogels. They consist of a three dimensional polymer network, that is able to store huge amounts of water. Due to the change of special physical parameters, for example the temperature, the fluid is pushed out of the network and the gel shrinks. The volume change can be used to perform mechanical work. This behavior makes hydrogels suitable for the use as valves or pumps.