Development performance within the Dresden Innovation Center Energy Efficiency: Recycling for photovoltaic processes (PV processes)
Duration: December 2009 - December 2013
In terms of PV-processes an efficient use of resources is required due to an increasing cost pressure in the international market. Several plasma etching processes can come into operation when producing solar cells, using mainly fluorinated etching gas species with a high global warming potential. Primarily the exhaust is disposed amongst others by thermal combustion or absorption. Because of the low degree of precursor utilization unused gas needs to be disposed in abatement systems resulting in high costs. The aim of this project is the development of a recycling–plan to reuse several components of the waste gas. Therefore new gas separation and purification methods are developed.
