Contribution to ASMC honored with Best Student Paper Award

Members of the chair, Christian Flechsig, Dr. Jacob Lohmer, and Prof. Rainer Lasch, were honored with the Best Student Paper Award at the recent Advanced Semiconductor Manufacturing Conference (ASMC) for their paper “Automated and Optimized Lot-To-Order Matching in 300 mm Semiconductor Facilities” (http://dx.doi.org/10.1109/ASMC51741.2021.9435730).

The paper deals with the optimization and automation of the lot-to-order matching (LTOM) process, which is particularly important for factory performance in the semiconductor industry. Based on the results of a multi-year research project with diverse partners, such as Infineon Technologies Dresden GmbH & Co. KG, the paper describes the proposed approach to optimize and automate the LTOM process for 300 mm silicon wafers. As a result, the allocation accuracy and average lot size were increased, and lead time and “manufacturing waves” due to uneven lot starts could be reduced. In addition, the high working time savings for the responsible employees and the resulting increase in employee satisfaction are remarkable.

Furthermore, the authors were invited to expand the ASMC paper and publish it in a Special Issue of the renowned IEEE Transactions on Semiconductor Manufacturing, a leading journal for microelectronics and integrated circuits. The revised article “Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-To-Order Matching Process” has been accepted recently and can be accessed at https://doi.org/10.1109/TSM.2022.3184041. It enhances the ASMC paper by the optimized and automated LTOM process for 200 mm wafers, thus, supporting the dissemination of results of the successful European project “iDev40” (http://www.idev40.eu/) or (https://www.youtube.com/watch?v=BGIq8Zlh0fI).