Published Journals 2013 11 bis 20 von 23 EinträgenGeidel, M.; Junige, M.; Albert, M.; Bartha, J.W.: In-situ analysis on the initial growth of ultra-thin ruthenium films with atomic layer deposition. In: Microelectronic Engineering 107 (2013), S. 151–155Woijcik, H.; Hossbach, C.; Kubasch, C.; Verdonck, P.; Barbarin, Y.; Merkel, U.; Bartha, J. W.; Hübner, R.; Engelmann, H.-J.; Friedemann, M.: Enhanced growth and Cu diffusion barrier properties of thermal ALD TaNC films in Cu/low-k interconnects. In: Microelectronic Engineering 110 (2013), S. 29–34Vasilev, B.; Bott, S.; Rzehak, R.; Bartha, J. W.: Pad roughness evolution during break-in and its abrasion due to the pad-wafer contact in oxide CMP. In: Microelectronic Engineering 111 (2013), S. 21–28Lüssem, B.; Tietze, M. L.; Kleemann, H.; Hossbach, C.; Bartha, J. W.; Zakhidov, A.; Leo, K.: Doped organic transistors operating in the inversion and depletion regime. In: Nature Communications 4 (2013), Nr. Article number: 2775Hensel, R.; Finn, A.; Helbig, R.; Braun, H.-G.; Neinhuis, C.; Fischer, W.-J.; Werner, C.: Polymer membranes with omniphobic wetting characteristics inspired by springtail skin morphology : Poster. In: European Symposium on Biomaterials and Related Areas (BioMAT 2013), Weimar, Germany, 2013 (2013)Teng, L.; Plötner, M.; Türke, A.; Adolphi, B.; Finn, A.; Kirchner, R.; Fischer, W.-J.: Nanoimprint Assisted Inkjet Printing to Fabricate Sub-micron Channel Organic Field Effect Transistors. In: Microelectronic Engineering, 110 (2013), S. 292–297Finn, A.; Lu, B.; Kirchner, R.; Thrun, X.; Richter, K.; Fischer, W.-J.: High aspect ratio pattern collapse of polymeric UV-nano-imprint molds due to cleaning. In: Microelectronic Engineering, 110 (2013), S. 112–118Waegner, M.; Finn, A.; Suchaneck, G.; Gerlach, G.; Eng, L.M.: Connected Lead Zirconate Titanate Nanodot Arrays for Perspective Functional. In: Journal of Nanoscience (2013)Sauer, S.; Kirsten, S.; Storck, F.; Grätz, H.; Marschner, U.; Ruwisch, D.; Fischer, W.-J.: A Medical Wireless Measurement System for Hip Prosthesis Loosening Detection Based on Vibration Analysis. In: Sensors and Transducers Journal 18 (2013), S. 134–144Renner, A.; Marschner, U.; Fischer, W.-J.: A New Imaging Approach for In-situ and Ex-situ Inspections of conductive Fiber Reinforced Composites by Magnetic Induction Tomography (MIT). In: Journal of Intelligent Material Systems and Structures, 23. Oktober 2013 (2013)Zurück 1 2 3 WeiterDiese Informationen werden vom Vorgängersystem FIS bereitgestellt.