Publikationen der Professur für Halbleitertech­nik

191 bis 200 von 284 Einträgen

Estel, K.; Künzelmann, U. ; Bartha, J.W.; Mayer, E.-P.; Barthel, H.: Influence of Ionic Strengths and pH-Values of Model-Slurries for Chemical Mechanical Silicon Dioxide Polishing with different Nanodispersed Pure Silica Suspensions. In: Nanofair 2010, Dresden, 6.-7. Juli 2010 Poster (2010)

Schumacher, H.; Künzelmann, U.; Vasilev, B.; Eichhorn, K.-J.; Bartha, J.W.: Applications of Microstructured Silicon Wafers as Internal Reflection Elements in Attenuated Total Reflection Fourier Transform Infrared Spectroscopy. In: Applied Spectroscopy 64 (2010), Nr. 9, S. 1022–1027

Geidel, M.; Knaut, M.; Albert, M.; Bartha, J.W.: In-situ XPS study on the growth of ultra-thin Al-O and Ti-O based films with atomic layer deposition. In: E-MRS 2010 Spring Meeting in Strasbourg, 07.06.2010-11.06.2010 Poster (2010)

Kubasch, C.; Klaus, C.; Ruelke, H.; Mayer, U.; Bartha, J.W.: Investigation of Moisture Uptake in Low-k Dielectric Materials. In: IEEE Transaction on Electron Devices 57 (2010), Nr. 8, S. 1865–1872

Strobel, C.; Leszczynska, B. ; Zimmermann, T.; Albert, M.; Bartha, J.W.; Kuske, J.: Dynamic VHF-PECVD concept tool with linear plasma sources for silicon based thin film solar cells. In: Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, 2010 (2010)

Menzel, S. B.; Thomas, J.; Weißker, U.; Schäffel, F.; Hoßbach, C.; Albert, M.; Hampel, S.; Gemming, T.: Preparation of CNT-Copper Matrix Composite Films. In: Journal of Nanoscience and Nanotechnology 9 (2009), Nr. 10, S. 6096–6103

Parshina, L.S.; Novodvorsky, O.A.; Panchenko, V.Ya.; Khramova, O.D.; Cherebilo, Ye.A.; Lotin, A.A.; Wenzel, C.; Trumpaicka, N.; Bartha, J.W.: Electric properties of heterogeneous transitions between n - and p - type ZnO films and n - and p - type silicon substrates. In: Book of abstract of the 17th International Conference on Advanced Laser Technologies, Antalya, Turkey, September 26- October 01 (2009), S. 162

Khramova, O.D.; Novodvorsky, O.A.; Panchenko, V.Ya.; Sokolov, V.I.; Parshina, L.S.; Cherebilo, Ye.A.; Lotin, A.A.; Khaydukov, E.V.; Rocheva, V.V.; Wenzel, C.; Bartha, J.W.: The influence of annealing on characteristics ZnO:N films. In: Book of abstract of the 17th International Conference on Advanced Laser Technologies, Antalya, Turkey, September 26- October 01 (2009), S. 69

Cherebilo, Ye.A.; Parshina, L.S.; Novodvorsky, O.A.; Panchenko, V.Ya.; Khaydukov, E.V.; Khramova, O.D.; Wenzel, C.; Trumpaicka, n; Bartha, J.W.: Creation of ohmic contacts on n - and p type ZnO films by PLD method. In: Book of abstract of the 17th International Conference on Advanced Laser Technologies, Antalya, Turkey, September 26- October 01 (2009), S. 220

Richter, K.; Viehweger, K.; He, J.; Bartha, J.W.: Creation of Vias With optimized Profile for 3-D Through Silicon Interconnects (TSV). In: Plasma Process. Polym. 6 (2009), S. 193–197

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Martin Knaut
Letzte Änderung: 05.10.2022