Development of an integrated plasma gas recycling scheme

Duration: September 2012 - February 2015

OGAPLAS
The use of noble gas mixtures for operating atmospheric pressure plasma processes can lead to high process costs, in particular for scaled applications. Furthermore dangerous products for the environment can possibly be formed during layer deposition. Those must be disposed at very high costs to prevent dangerous emissions. The focal point of the project lies in the gas recycling using adsorptive separation methods for the reduction in costs of plasma processes.