Plasma Technology
Lecturer in charge: Prof. Elizabeth von Hauff, Dr. Agne Zukauskaite
Instructors: Prof. Elizabeth von Hauff, Dr. Agne Zukauskaite
This course has been offered in English since winter term 2022/23. It is aimed at students of Electrical Engineering, Nanoelectronic Systems, Mechanical Engineering, Physics, Chemistry, and other technical programs.
OPAL-course (further information and educational materials)
Part of the modules
Lecturer in charge: Prof. Dr. Elizabeth von Hauff
| Term |
9. term, elective module ET-MEL (HMT) |
| V/Ü/P | 4/2/0 |
| ECTS credit points | 7 LP |
| Courses (IFE) |
Plasma Technology (4/2/0) This course is offered in english language. |
|
Exam |
written exam 90 min |
Contents
The module contents include:
1. The fundamentals of plasma physics, industrial plasma processes, and process tool design
2. Basics of thin film growth, hard coatings and barriers, glass and optical coatings, electronic and functional coatings, and treatment technologies.
Objectives
Students have a fundamental understanding of the physics of plasmas used in industrial processes and tools. Furthermore, they are able to choose suitable technical plasma sources and plasma process tools for specific applications. In addition they can name typical examples for layers and layer stacks used in major application fields for coatings.
Lecturer in charge: Prof. Dr. Elizabeth von Hauff
| Term |
3. term, elective module NES-TEC, |
| V/Ü/P | 4/2/0 |
| ECTS credit points | 7 LP |
| Courses (IFE) |
Plasma Technology (4/2/0) This course is offered in english language. |
|
Exam |
written exam 90 min |
Contents
The module contents include:
1. The fundamentals of plasma physics, industrial plasma processes, and process tool design
2. Basics of thin film growth, hard coatings and barriers, glass and optical coatings, electronic and functional coatings, and treatment technologies.
Objectives
Students have a fundamental understanding of the physics of plasmas used in industrial processes and tools. Furthermore, they are able to choose suitable technical plasma sources and plasma process tools for specific applications. In addition they can name typical examples for layers and layer stacks used in major application fields for coatings.