Compulsory Modules

Academic and Scientific Work

After completing this module, students have the key competencies for the academic and scientific work. You can deal critically with scientific texts or pass on their knowledge to other people and support their learning process. This includes the understanding of the essential content of scientific texts, their classification in the current scientific context, the critical reflection of social, economic and cultural impact as well as their representation and presentation. To stimulate the development of knowledge among learners and to enable, the students have acquired knowledge from the general university teaching and can apply this. (module page in OPAL)

Fundamentals of Estimation and Detection

To identify systems or to track their state, parameters and variables have to be estimated. Estimation theory is the mathematical foundation for finding out the value of state defining parameters, functions, variables, and to identify the system state based on this. Detection theory is the mathematical foundation for making decisions, e.g. either of the value of a signal out of a discrete valued symbol alphabet, or to recognize signals out of a class of models.
This course provides an introduction into the estimation and detection theory which is a topic within the field of statistical signal processing that is applied e.g. in control, communications, and process monitoring.
General methods of parameter  estimation/detection are provided (e.g. ML and MAP rules, Neyman-Pearson-Theorem, Bayes' detection/estimation), as well as quality criteria of estimators (bias, efficiency, Cramer-Rao bound) and foundations of linear estimators (e.g. Wiener Filter). (course webpage)

Hardware/Software Codesign

This course covers fundamental processing hardware and software implementation challenges and methodologies. In particular the design tradeoff and design methodologies of co-designing both, hardware as well as software systems are covered, with an emphasis on hardware architecture design. By moving into nano-scale devices very large-scale realization possibilities are enabled which requires a special emphasis to be given on parallel processing and multi-processor systems. To deepen the understanding of the topic a practical lab course is offered in addition to the class. (course webpage)

Lab Sessions

In two  labs, the students deal  with the embedded system design using the Lego Mindstorm system and  the production of a solar cell.

The "Robolab 2" is the initial event for the masters program. The students process different tasks to control a vehicle realized with the Lego Mindstorm tool set. The tasks are carried out in small groups (2-4 people) or individually. (course webpage)

In the "Solar Cell Manufacturing Lab", students carry out  the manufacturing steps for producing a solar cell independently and then measure this solar cell. The required process steps in solar cell manufacturing are classical process steps in semiconductor manufacturing. The lab will take place within a block of 2 weeks. (course webpage)

Principles of Dependable Systems

For safety critical systems, the risk of software failures must be negligible. In this course we will present design principles for building highly dependable systems, i.e., systems that are available, reliable and secure. The scope of dependability ranges from simple hardware components up to complex distributed systems. (course webpage)

Project Work

Each student process a complex task of modern engineering work experiences as part of a research group. Finally he/she document and present the results.

Radio Frequency Integrated Circuits

High frequency integrated circuits for high speed wireless communications such as low noise amplifiers, power amplifiers, mixers, oscillators on basis of active and passive devices, as well as complete radio frontends and architectures, are lectured. The advantages and challenges of aggressively scaled CMOS and BiCMOS, Moore than Moore (e.g. FinFET, SOI, strained silicon) and Beyond more Moore (silicon nano-wire, carbon nano-tubes (CNT) and organic) technologies are discussed from circuit design perspective. (course webpage)

Pre-Knowledge: U. Tietze, Ch. Schenk, Electronic Circuits (German Version: Halbleiterschaltungstechnik), mainly Chapter 3 (FET), Chapter 4 (Amplifiers), Chapter 15 (power amplifiers) and Chapter 25 (Transmitter and Receiver)

Semiconductor Technology

Semiconductor Process Technology: The course covers the basic technologies for the manufacturing of semiconductor devices, integrated circuits as well as micro- and nanosystems. The main objective is to describe the synergy between the physical, chemical, and technological aspects of the different technologies and the interrelation within the specific manufacturing process. (course webpage)

Semiconductor Process Integration: Process integration, which means the smart assembly of individual process steps to make an integrated circuit is the major topic of this course. Beginning with a MOS capacitor, the specifically required process chain will be worked out in a kind of engineering chronology. The complex interrelations at the different technologies for RAM-, SRAM- and logic IC’s will be covered. The interaction between the physical function of a device and the methodology of its manufacturing becomes specifically clear by means of the modern self alignment techniques. 
Laboratory part covers: PECVD- Deposition, RIE- Dry Etching, PVD- Deposition, Lithography, ECD Electrochemical Deposition, Anisotropic Etching (course webpage)

Elective Modules for key area Technology

Innovative Semiconductor Devices

The objective of the lecture is to introduce device concepts that can fulfill special requirements e.g. for scaled devices, power devices, high frequency devices etc. Based on the basics of diodes, bipolar transistors and MIS transistors the special features that enable the fulfillment of important requirements will be discussed in detail. At the end of the lecture the students will know both the principal concepts as well as their technological realization as a basis for their own later work in that field.

Materials for Nanoelectronics and Vacuum Technology

Materials for Nanotechnology: The lecture provides basic knowledge of materials in nanotechnology. Proceeding the effects of small structures, the basic types of nanoelectronic structures are introduced. Additionally, the students will get an overview over the most important material systems of nanotechnology including fabrication methods, structure formation, assembly and properties. General material-technological challenges in nanotechnology will also be addressed. (course webpage)

Vacuum Technology: Within the micro- and nanotechnology, vacuum processing plays a significant role. In this course, the necessary vacuum basics for the fundamental understanding of these processes will be acquired. It includes gas kinetic, ranges of vacuum and gas flow, vacuum generation and measurement. This knowledge enables a deep understanding of the physics within a vacuum process but also provides the insight for the technology appreciation. (course webpage)

Materials for the 3D System Integration

3D System Integration and 3D Technologies (Prof. Panchenko): This lecture provides knowledge in the area of the modern 3D system integration technologies, which is a special branch of the electronics packaging. Starting with explanation of the different 3D concepts, the main technological steps and challenges of the vertical interconnect or through silicon via (TSV) fabrication are introduced. Further the TSV plating and bump fabrication, thinning of the wafer as well as stacking procedures will be explained. Different bonding technologies (metal diffusion, solid-liquid interdiffusion and hybrid) will be described. (course webpage)

Micro-/Nanomaterials and Reliability Aspects (Prof. Panchenko):  This lectures deals with the material systems that are typically used in the 3D system integration. The main metallic materials (Cu, solder) and new nanomaterials (nanocomposites, functional layers, nanoporous materials) for the interconnects will be the focus of this lecture. Due to the large number of material interfaces the resulting thermo-mechanical stress appears to be a reliability issue for the functionality of 3D systems. These reliability aspects will be discussed in terms of material combinations, processing and application.

Memory Technology

This module covers established memory concepts in part I and concepts which are in research respectively development stage in part II. 

  • Part I: Magnetic memories, optical memories, semiconductor memories (SRAM, DRAM, nonvolatile memories (EPROM, EEPROM, Flash)) (course webpage)
  • Part II: Innovative semiconductor memories (ferroelectric memories, magnetoresistive memories, resistive memory, organic memories and single molecule memories) (course webpage)

Molecular Electronics

The basic principles of molecular electronics will be presented, with particular attention to physical effects and experimental methods. The most relevant experimental and theoretical methods for the investigation of charge transport at the molecular scale will be discussed. In particular, the following points will be treated in detail:

  • Electronic properties of molecules
  • Charge transport at the nanoscale
  • Molecular elements (Diodes, Transistors, Sensors)
  • Scanning probe and and break-junction methods
  • Single molecule electronics
  • Molecular architecures

    (course web page)

Nanotechnology and Material Science

The module deals with the physical foundations of nanotechnology (course webpage) and the fabrication and properties of nanostructured materials (course webpage). The following topics are discussed:

  • quantum effects, mesoscopic systems, scaling laws
  • fabrication of clusters and nanotubes
  • band structure, density of states, electron transport in low-dimensional solids
  • theoretical foundations of scanning tunneling microscopy, atomic force microscopy, and optical near-field microscopy
  • nanostructuring via electron beam lithography, optical lithography, and scanning probe methods
  • giant magnetoresistance, single-electron devices


Optoelectronic Devices and Systems (Prof. Lakner):

  • Basic principles and technical realisation of optoelectronic devices and systems
  • Light Emitting Diodes, Laser Diodes
  • Compound semiconductors, organic semiconductors
  • Micro Opto Electro Mechanical Systems for spatial light modulation
  • Application of optoelectronic devices like projection systems, displays, modulators and optical storage

Nanooptics (Prof. Eng): Nanooptics describes optical phenomena occurring on the length scale below the diffraction limit of approximately half the wavelength ~λ. The optical interaction between fluorescent molecules, between molecules and a metallic or dielectric surface such as a nanoparticle and nanowire antennas, or the effect of surface enhanced Raman scattering used for nanoscale surface analysis, all base on such optical far- and near-field coupling effects. Nanooptics thus has the power of providing optical characterization on the 10 nm length scale and hence being of great benefit to many new fields and nanodevices. Of importance, however, is the understanding and interplay of different physical effects such as radiative and nonradative damping, electric field enhancement, optical transitions, and others more. This lecture will provide the necessary background, as well as the view into prospective applications. (course webpage)

Semiconductor Industry Challenges: Market Dynamics – Technology Innovations – Yield and Reliability Engineering

Dynamics and economics of the semiconductor market driven by technological innovations (Prof. Dr. Peter Kücher): On the one hand, the challenges of the semiconductor industry can be described technologically by the reduction of feature size with the introduction of new methods and materials (“More Moore”) and by expansion of the functionality ( “More than Moore”) up to new systems and their integration. On the other hand, the economic boundary conditions for research and production are currently changing fundamentally. Besides the capability to operate manufacturing lines cost efficient, in future also based on 450mm wafer, the introduction of new technologies and their implementation within a product within new business concepts is of increasing importance.

The lecture will describe the development of the semiconductor market within the last decades, the change of the boundary conditions by the market requirements and the consequences for material-, equipment- and chip manufacturer. Development and manufacturing concepts e.g. different cooperation concepts and their regional and global consequences are presented. In correlation to the International Technology Roadmap of the Semiconductor Industry their importance for the solution of technological and economic challenges will be discussed.

The goal of the lecture is to understand the correlation between a quite dynamically changing market environment, technological challenges and the structure of the participating manufacturer as well as specific characteristics of the semiconductor market in comparison to more mature ones. Technological developments as well as yield and reliability engineering can be understood in the context and their impact on development, products and manufacturer.

Reliability Engineering and Kinetics of Degration Processes in Advanced Electronics (Prof. Dr. Ehrenfried Zschech, jointly with Dr. Oliver Aubel and Dr. Martin Gall): For micro- and nanoelectronic products, functionality, performance and reliability depend on design, applied technology and used materials. The reliability of the product is limited by the kinetics of degradation processes of the materials and device. The understanding of the fundamentals of reliability physics and engineering is crucial for the design and the manufacturing of reliable and cost-effective high-performance products, including the selection of proper process steps (technology) and of the materials used.

The goal of the lecture is to teach the methodology of reliability physics and engineering and its practical impact on product quality in semiconductor industry. Reliability-limiting effects in transistors, on-chip interconnect stacks, and advanced packaging including 3D IC integration will be discussed in particular. Another focus of this lecture is the role of reliability for product lifetime and specific future challenges. In addition, the kinetics of degradation processes and failure mechanisms will be elaborated based on experimental results and complementary modelling and numerical simulation. The need of multi-scale modelling and multi-scale materials data for FE analysis will be demonstrated. The lecture will show the close interaction between device design, technology, materials as well as the need of physical analysis techniques.

Elective Modules for key area Design

Computational Photonics

This is a graduate level course on the simulation various photonic structures including complex waveguides, resonators, photonic crystals using MATLAB or a similar available software. The aim of the course is to provide knowledge and expertise for simulating those structures using Beam Propagation Method (BPM), Finite Difference Time Domain (FDTD), Finite Element Method (FEM), and Eigen mode calculation methods. At the end of the module students, learn the practical scope and constraints of these algorithms which is needed for modeling and analysis of different Micro and Nano photonic components.

Electromechanical Networks

Functional elements with nanometer dimensions or layer thicknesses determine the function of Microelectromechanical System (MEMS) components. These components are designed based on behavioral and structural models of the microsystem and its components, which are simulated. This course is an introduction to linear system modelling including translational and rotational mechanical structures, fluidic (acoustical) structures, and electrical structures, as well as transducers between the domains. The models are circuit representations of electromechanical systems which use analogies between components (capacitor O─O mass, inductance O─O compliance) and which can be simulated with pSpice. Besides, models with concentrated parameters mechanical circuits with distributed parameters (bending, mechanical wave guides), circuits with transducers (reversible sensors and actuators) and the transformation of components into other physical domains are subject of the lecture. A term project related to each students research provides experience with electromechanical systems modelling. (course webpage)

Hardware/Software Codesign Lab

The HW/SW-Codesign Lab uses the reconfigurable processor flow from the company Tensilica to demonstrate the potential of HW/SW Codesign. The Tensilica Instruction Extension (TIE) is a description language that allows to modify the standard RISC/VLIW pipelines of the different baseline processors. Out of the TIE description a modified compiler, assembler, linker, debugger and a cycle accurate processor simulator are generated. Thereby architecture modifications and their impact to the software can be analyzed with short turn-around times and manageable complexity. An energy and area estimator can be used to infer some estimates on the hardware complexity of the modified architecture without the need for setting up a complete RTL synthesis flow.

Integrated Circuits for Broadband Optical Communications

The design of integrated circuits in aggressively scaled nano-technologies is lectured with focus on optical broadband communication systems. Transimpedance amplifiers, detector circuits, laser drivers, multiplexers, frequency dividers, oscillators, phase locked loops, synthesizers and data recovery circuits are treated. The challenges (e.g. large bandwidth, gain, noise and good large signal performances despite of low available voltages) and corresponding solutions or circuits in nano-technologies are discussed. (course webpage)

Integrated Photonic Devices for Communications and Signal Processing

This is a graduate level course on theory, design, technology, and applications of integrated optical devices with the emphasis on silicon semiconductor photonic to be used for communications and signal processing. The aim of the course is to provide introductory knowledge and basic understanding of integrated optical devices. The theoretical bases as well as design and simulation of integrated optical devices including passive structures (waveguides, couplers, Gratings, Interferometers, resonators, filters) as well as electro optic modulators (Mach Zehnder and micro ring modulators), electro absorption modulators, photo detectors, and lasers will be presented. At the end of the module, you have an overview about photonic devices that are currently realized in silicon.

Lab VLSI Processor Design

Participants in this course form a design team and implement a VLSI-processor system (approximately 30000-400000 transistors). Besides dealing with the standard cell design system CADENCE be especially abilities in the partitioning of large systems, modelling, verification and testing of such systems and the management of any co-ordination and organizational problems of such a complex design task in a design team are trained. The conclusion made ​​by a written document.

Modeling and Characterization of Nanoelectronic Devices

The module comprises two courses:

  • Characterization of micro- and nanoelectronic devices  (summer semester, course webpage)
  • Modeling of nanoelectronic devices (winter semester, course webpage)

One focusing on practical modelling and measurement aspects typically encountered in an industrial environment, and the other one covers emerging nanoelectronic devices that have a high potential for revolutionizing future analogue and high-frequency electronic applications. Both lectures are accompanied by exercises including a student lab. Major topics of this module are:

  • Overview on typical methods for the experimental characterization of advanced electronic devices, including small-signal, noise and distortion measurements
  • Present research trends and special device modelling related topics relevant for the semiconductor industry (incl. test structures, model parameter determination, statistical modeling, thermal effects)
  • Fundamentals of one-dimensional (1D) carrier transport in emerging devices (e.g. nano-tube/-wire field-effect transistors)
  • Multi-scale modelling of 1D nanoelectronic devices from carrier transport to compact models (i.e. circuit level) and application to experimental characteristics.

Elective Modules for key area Applications


Signal theory: sine signals, Dirac impulse, spectral representation, low pass signals, band pass signals; Linear time invariant systems; Analogue modulation: amplitude modulation, frequency modulation; Sampling theorem: sampling theorem for low-pass signals, sampling theorem for band-pass signals, sampling kernels; Digital modulation: frequency shift keying, phase and amplitude modulation; Stochastic signals: spectral properties, correlation, noise; matched-filter design, bit error probability for AWGN channels.

Upon completion of this course, the student has received an understanding of the fundamentals of communications signal transmission and receiption. Basic practical implementation problems as e.g. synchronization have been addressed, without showing solutions within this course. The student has an understanding of complex baseband representation of signals, and has a first understanding of the different set of basic modulation techniques. Also, the transmission over noisy channels introduces the concept of understanding that errors occur when transmitting signals. (course webpage)

Modeling and Simulation of Telecommunication Systems

In order to design telecommunication systems and communication networks, it is necessary to study the traffic performance of these systems (performance evaluation). First, this requires to define and use appropriate models of queueing theory. Besides, analytical investigations by methods of mathematical queueing theory, discrete event simulation is often used. In this course, modelling techniques, simulation methodology and simulation tools are presented. An introduction to ns-3 is given. In exercises, actual problems of network performance in IP and mobile networks are simulated. In the end, students are familiar with current modelling and simulation technologies. (course webpage)

Real-Time Systems

Real-time systems are systems whose correct functioning also depends on the observation of timeliness agreements. The main objective of this module is to teach the fundamentals of Real-Time systems.The content of this module is based on the observation that the construction of real-time systems requires comprehensive thinking about many different sub-fields of Computer Science. This module first introduces fundamental real-time concepts (modeling of load and resources, time, clocks and clock synchronization, time-controlled vs. event-controlled designs, scheduling procedures). Building on that, topics related to real-time systems from several sub-fields of Computer Science will be discussed. Among these are real-time programming languages, synchronous and event-controlled systems, real-time operating systems, real-time systems and hardware, micro-controller, caches, real-time communication in field buses and wide area networks and application of real-time systems. (course webpage)

Software-Fault Tolerance

During the development of software it is infeasible to find all its bugs, which can reach as far back as the design phase. Therefore, it is reasonable to deal with the remaining software faults (bugs) during runtime to increase the overall reliability. This course will evaluate a selection of fault-tolerance mechanisms and analysis methods that can be applied statically or dynamically. (course webpage)

Stochastic Signals and Systems

The subject area "System Theory" includes general definitions and basic methodology that are required to describe dynamic processes in nature and engineering. 

The student should recognize that physical and technical systems, especially in electrical/electronic engineering, automatic control, and information technology, can be investigated consistently and described mathematically by a unified point of view. This module focuses on methods for investigating static and dynamic systems under the influence of stochastic signals. For this purpose, the theory of the stochastic process is  initially introduced, based on probability calculus. Methods for its mathematical description are presented.

The transfer of stochastic signals by abstract systems is elaborated mainly for nonlinear static systems (transformation of the probability density function) and for linear dynamic systems (transformation of the power density spectrum). (course webpage)

Systems Engineering

Systems Engineering is about the activity of designing, building and operating software platforms. This course tries to focus on progressive topics that are related to the software development process. These include exposing parallelism on current hardware, ensuring composability and safety of complex modules, testing methods to find bugs as early as possible and the management of human resources that should encourage collaboration.

Outline: Multicores and Concurrency, Software Transactional Memory, System Architecture, Feature Engineering, Agile Development, Testing, Stream Processing and Distributed Event Processing (course page)

Theory of Nonlinear Networks

Nonlinear networks play an important role in various scientific areas and show a huge variety of interesting and useful properties. This module introduces the principles of nonlinear networks. Aspects such as network states, stability and time development will be covered. In the second part of the module, Cellular Nonlinear Networks and memristive networks are discussed in detail as examples. These networks are modern applications which draw their functionality from their properties as nonlinear networks. (course web page)

Ubiquitous Information Systems

This module will provide an overview of middleware architecture and platforms for the development of distributed applications and information systems. In doing so, the focus will be both on the intensive discussion of the field of mobile communication or mobile processing and on the transactional processing in distributed environments (especially with regard to large information systems). The students will learn to identify and develop concepts and architectures for distributed and omnipresent application and information systems, to choose appropriate solutions, and to evaluate modern technological developments in this field.


  • Distributed Systems: an introduction to problems, concepts and solutions of Distributed Systems. It covers basic principles such as the client/server model, remote procedure call, distributed object-oriented systems as well as current standards. (course webpage)
  • Mobile Communication/Computing: an introduction to principles, standards and solutions for mobile communication and its applications within the area of mobile computing. Based on the physical foundations of mobile communication channels, typical standards such as GSM (Global System for Mobile Communication) are presented. Techniques for locating mobile users and mobile devices also present a major focus area. In the area of application support, typical software architectures and services for mobile computing are discussed. Examples of application areas covered are sales support and service engineering. An outlook towards high performance communication in mobile networks and related applications concludes the lecture. (course webpage)

Wireless Sensor Networks

Wireless sensors are tiny, low-cost, low-power, multifunctional sensor nodes with the capability of sensing certain physical properties, data processing, and communication in short distances. A large amount of such sensor nodes organize themselves in a highly dynamic manner to carry out a coordinated sensing task which covers a very large area such as a mining field or a battle zone. Unlike traditional networks, establishing wireless sensor networks impose specific challenges owing to the fact that the sensors are resource constrained and, by and large, unattended. This lecture will focus on proposed self-organizing algorithms, medium access control and routing algorithms, query and localization techniques, and data storage mechanisms. (course webpage)

Nontechnical Elective Modules

German Language and Culture

The participants of the module "German Language and Culture" have the possibility to take part in a basic course of general German language. In this course, apart from the German language teaching on the A1-level (CEFR), regional and specific cultural knowledge about Germany and especially the region of Saxony is offered.

Investing in a Sustainable Future

Investing in a Sustainable Future is a cross-disciplinary, cross-cultural and collaborative learning experience providing participants the opportunity to identify, evaluate and apply innovative solutions to environmental problems. Students will learn about the many challenges associated with the transition to a sustainable society, and will work together in multidisciplinary teams to analyze real-world investment projects meeting rigorous standards for sustainability, strategic fit, financial performance, and business practicality.

The mismatch between the demands of an increasingly-consumptive population and a decreasing resource base has troubled economists and ecologists for more than two centuries. These concerns have gained currency as global warming, ozone depletion, soil erosion, species extinction, overfishing, and air and water pollution have made headlines across the world. Investing in a Sustainable Future focuses on efforts being made by businesses, governments and NGOs to incorporate "sustainability criteria" into their investment appraisal processes.

Value creation is the objective of all business activity, be it for customers, employees, or investors. Maximization of shareholder wealth is the goal of all financial practice in the United States and in many other parts of the world as well. The ability to create and manage value depends upon one’s capacity to identify and forecast future events, to evaluate the strategic and financial implications of particular alternatives, and to apply oneself to the implementation of a particular choice. This course concentrates upon the acquisition and development of these critical business skills while maintaining a vision of sustainability at its forefront.

Study Advisor Nanoelectronic Systems


Ms Dipl.-Phys. Manuela Tetzlaff

Address work

Visiting address:

Barkhausen-Bau, Room 161 Helmholtzstr. 18

01069 Dresden

work Tel.
+49 351 463-37363
fax Fax
+49 351 463-37740

Office Hours:

13:00 - 14:00
13:00 - 14:00

Examination Office


Ms Uta Strempel

Nanoelectronic Systems and Information Systems Engineering

Address work

Visiting address:

Barkhausen-Bau, Room 177a Helmholtzstr. 18

01069 Dresden

work Tel.
+49 351 463-42280
fax Fax
+49 351 463-34364

Office Hours:

13:00 - 17:30
13:00 - 15:30

Out of office from 22/5–2/6/2017

About this page

Monique Rust
Last modified: Nov 01, 2017