completed Doctorates & Habilitations
Filter: Field Engineering Sciences, Faculty of Mechanical Science and Engineering, Theses, Dissertation & Habilitation
Analysis of Critical Conditions during Wafer Testing by the Use of the Finite Element Method
Art der Abschlussarbeit
Dissertation
Autoren
- Ochoa-Brezmes, Angel
Betreuer
- Prof. Dr. rer. nat. habil. Cornelia Breitkopf
Schlagwörter
IndentationMicroelectronicsImprint depthElastic-plastic deformationFilm thicknessMechanical reliability
Berichtsjahr
2018
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